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What role do HEPA filters play in the chip fabrication process?

There is no room for dust in CUP's eyes
We have learned that the minimum process of the current CPU can reach 5 nanometers or even 2 nanometers. The diameter of dust in the air is about 0.2-2.5 microns, and some places with poor environments will have many particles larger than 2.5 microns. The level of 2.5 microns is what we usually refer to as PM2.5. And 1000 nanometers is equal to 1 micron, so we can imagine that a particle of one micron in the air falls on the chip, which directly causes the chip to be damaged, causing short circuits and open circuits. We have to admit that the CPU is a microscopic world, and the direct structure inside cannot be clearly seen with the naked eye alone, and the particles in the particulate air cannot be seen directly with the naked eye alone. But it is also because these suspended particles cause a lot of trouble in the production process of the CPU.
According to the current standard, in the production process of the chip, a high-level clean workshop must be used, equipped with high-level HEPA filters, usually the H13 HEPA filters level we use may not be applicable in this regard, and U15, U16, U17 must be used. Ultra high efficiency filter.
Can the high-efficiency filters currently produced in China be suitable for the chip manufacturing process?
This aspect is not very certain, mainly because China's chip production has not yet reached a very large order of magnitude, so in the process of using the filter, there are not many domestic applications involving the high-precision chip industry. Some high-efficiency filter giants also have branch factories and offices in China, and their technology is obviously better than some domestic manufacturers. At present, the domestic high-efficiency filters are still relatively extensive in the production process. At present, they are mainly H13 and H14 grades. With the R&D investment and development of our country in chips, the production of our high-efficiency filters is also It needs to grow in tandem to meet the standards of chip production. Of course, we also hope that domestic manufacturers can catch up with these traditional foreign-funded enterprises as soon as possible in some production design technologies and testing, and also hope that domestic high-efficiency filter manufacturers can provide high-efficiency filtration with better filtration accuracy. It will play its due role in these important chip manufacturing sites and contribute to China's air purification industry.
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